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Three-gun PVD Specifications​
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Substrates up to one or two-inch diameter, thickness 0.1mm to 60 mm
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3 independent sputtering guns (2.5 in)
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Background vacuum 1 x10-7 Torr
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Independent Pulsed DC
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Uniformity 5% (max-min), 1 sigma 3.7% for 2mm edge exclusion in a one inch sample
New Material Research Capability
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Metals
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Alloys
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Metal nitrides
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Metal oxides
Fast Prototyping with Rapid R&D Cycles
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More flexible, cheaper, faster research by small sample size
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Example case studies completed within two weeks
Example Case Studies
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