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Three-gun PVD Specifications​


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Substrate sizes: up to 1", 2", or 3" diameter, thickness from 0.1mm to 60 mm
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Equipped with 3 independent 2.5" sputtering guns
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Background vacuum 1 x10-7 Torr
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Independent pulsed DC power supplies for precise control
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Film uniformity: ≤5% (max–min); 1σ = 3.7% with 2 mm edge exclusion on a 1" sample
New Material Research Capability
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Metals
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Alloys
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Metal nitrides
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Metal oxides
Fast Prototyping with Rapid R&D Cycles
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More flexible, cheaper, faster research by small sample size
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Example case studies completed within two weeks

Example Case Studies
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