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Spectroscopy Ellipsometer (SE)

  • World-class instrument and expertise

  • Fast measurements

  • Thickness

  • Refractive Index

  • Unique optical  reverse engineering

World Class Ellipsometer: Woollam VASE

uv-vis-ir spectrometer

  • Thin-film thickness: 1 nm to 1 µm, uniquely accurate

  • Wide spectra optical constant, refractive index (n, k)

  • Band gap

  • Density profile along the thin film cross-section

VASE Ellipsometer Specification

Ag-SE

Unique Optical Reverse Engineering

  • Unique measurement methods

  • Plus Software simulation: Optilayer and Woollam W-VASE

Ellipsometry (SE) + Transmittance (T) accuracy much improved

  • SE+T provides much more accurate thickness, n,k properties than those measured by SE alone

  • Additional information (such as gradience) could be ​​obtained

new method

SE + T + Res (sheet resistance)

  • SE+T+Res provide more accurate thickness, n,k  

  • Additional information that could be ​​obtained accurately,

    • ​Gradience

    • Carrier density

    • Carrier mobility​

specrum
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