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*Thickness *Refractive Index *Optical Reverse Engineering
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- Unique Optical Reverse Engineering
Unique Optical Reverse Engineering
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Unique measurement methods
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Plus Software simulation: Optilayer and Woollam W-VASE
Ellipsometry (SE) + Transmittance (T): Thickness accuracy much improved
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SE+T provides much more accurate thickness, n,k properties than those measured by SE alone
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Additional information (such as gradience) could be obtained
Thickness accuracy
much improved
SE + T + Res (sheet resistance)
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SE+T+Res provide more accurate thickness, n,k
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Additional information that could be obtained accurately,
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Gradience
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Carrier density
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Carrier mobility
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