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Thin Film Material Screening

  • 1 or 2-inch sample size PVD deposition
  • More flexible, cheaper, faster research
  • Combinatorial Co-sputter is more efficient for material screening

Three-gun PVD to support the development of new thin films

  • co-sputtering of 3 different targets for new materials as well as creating stacks

Extensive new materials research capability

  • Metals

  • Alloys

  • Metal nitrides

  • Metal oxides

Periodic table
3 gun PVD tool
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