High-Quality Data
Unique Optical Reverse Engineering
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Unique measurement methods
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Plus Software simulation: Optilayer and Woollam W-VASE
Ellipsometry (SE) + Transmittance (T)
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SE+T provides much more accurate thickness, n,k properties than those measured by SE alone
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Additional information (such as gradience) could be ​​obtained
SE + T + Res (sheet resistance)
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SE+T+Res provide more accurate thickness, n,k
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Additional information that could be ​​obtained accurately,
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​Gradience
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Carrier density
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Carrier mobility​
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SE + T + F (film side reflectance) +G (glass side reflectance)
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Uniquely accurate to predict the optical film stack performance (T/F/G spectra meet with the simulations very well)
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Uniquely determined unknown film properties among the film stack
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​Gradience
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Carrier density
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Carrier mobility​
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