Nano Thin Film Research & Service Lab

Unique cost-effective PVD for High-quality thin film (sequential stacks or co-sputter)​​

• Three independent sputtering guns

• 1-inch or 2-in sample size

• Pulsed DC power supplies

• Vacuum down to 1x10-7 Torr

• Programmed recipes

Accurate, unique optical model design and prototype development

• High accuracy through unique methods

• Unique design from unique materials

• Wide parameter optimization capability

• Unique Optical Reverse Engineering

World class metrology + software/expertise

• Woollam Spectroscopic Ellipsometer

• Top notch UV-VIS-IR Spectrometer

• Four-point probe

• More  tools on-site with a partner

  • AFM/XRD/XRR/Profilometer/ SEM/EDX

Complete coating research cycle include coating,  annealing, characterization, optical reverse engineering, optical coating stack design.  

• Small sizes lead to low cost, faster,  flexible research

• 1 or 2-inch sample size PVD deposition

• Combinatorial Co-sputter is efficient for material screen​​​​​​​​​​​​​​​

Combinatorial technique, co-sputter fast screening materials capability, significantly reduce the research cost

• Metals

• Alloys

• Nitrides

• Oxides

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